Frederic's Bookshelf commented on Focus: De wereld van ASML by Marc Hijink
I did not realize that it’s the introduction of the TwinScan that allowed ASML to sprint ahead of the Japanese lithography players in 2004.
Not only did it achieve unparalleled precision thanks to immersion (the use of water under the lens to focus the light) but equally disruptive was that it could measure and expose the wafer in parallel yielding significant speed improvements in fabs.